Main components of a PVD vacuum coating machine 1. Vacuum chamber Coating equipment mainly includes continuous coating production line and single chamber coating machine. Stainless steel material manufacturing, argon arc welding, chemical polishing treatment on the surface, and various specifications of flange interfaces are welded on the vacuum chamber components. 2. Vacuum obtaining part In vacuum technology, the vacuum obtaining part is an important part. The vacuum can not be achieved by a vacuum equipment and method. Several pumps must be used in combination, such as mechanical pump, roots pump, molecular pump system, etc. 3. Vacuum measurement part The vacuum measurement part of the vacuum system is to measure the pressure in the vacuum chamber. Like the vacuum pump, no vacuum gauge can measure the whole vacuum range, so people have made many kinds of vacuum gauges according to different principles and requirements. Such as thermocouple, ionization meter, Pirani meter, etc. 4. Power supply The target power supply mainly includes DC power supply, intermediate frequency power supply, pulse power supply and radio frequency power supply (RF) 5. Process gas input system Process gases, such as argon (AR), krypton (KR), nitrogen (N2), acetylene (C2H2), methane (CH4), hydrogen (H2), oxygen (O2), etc., are generally supplied by gas cylinders, and then are introduced into the vacuum chamber through gas pressure reducing valve, gas stop valve, pipeline, gas flowmeter, solenoid valve and piezoelectric valve. The advantages of this gas input system are that the pipeline is simple and quick, and it is easy to repair or replace the gas cylinder. The coating machines do not affect each other. There are also cases where multiple coating machines share a group of gas cylinders, which may be seen in some large-scale coating workshops. Its advantage is to reduce the consumption of gas cylinders and unify the planning and layout. The disadvantage is that the number of joints increases the chance of air leakage. Moreover, the coating machines will interfere with each other, and the pipeline of one coating machine leaks, which may affect the product quality of other coating machines. In addition, when replacing the gas cylinder, it must be ensured that all machines are in non gas use state. 6. Mechanical transmission The coating requires that the thickness of the periphery must be uniform. Therefore, there must be three rotations in the coating process to meet the requirements. That is, while the large workpiece table is required to rotate (I), the small workpiece support table also rotates (II), and the workpiece itself can also rotate (III) at the same time. In mechanical design, a large driving gear is generally arranged at the center of the bottom of the large workpiece turntable, and some small star wheels are meshed with it. If the product rotation is to be realized, the workpiece rotation is generally driven by a fork. 7. Heating and temperature measurement The coating equipment generally has heaters at different positions, and the temperature is measured and controlled by thermocouples. However, because the position of the thermocouple clamp is different from that of the workpiece, the temperature reading cannot be the real temperature of the workpiece. There are many ways to measure the real temperature of the workpiece. You can install high-temperature test paper or thermocouple on the workpiece. 8. Ion evaporation and sputtering source The evaporation source of multi arc plating is generally in the shape of a round cake, commonly known as a round cake target, and there are also rectangular multi arc targets. A magnet is installed in the target base. By moving the magnet back and forth, the magnetic field strength can be changed, and the moving speed and track of the arc spot can be adjusted. In order to reduce the temperature of the target and the target base, the target base shall be continuously supplied with cooling water. In order to ensure high conductivity and thermal conductivity between the target and the target base, a tin gasket can also be added between the target and the target base. The magnetron sputtering coating generally adopts rectangular or cylindrical sputtering cathode. 9. Industrial control system 10. Water cooling system It is generally composed of cold water tower, chiller and water pump.