Diffusion Vacuum Pumps Salient features of dhve Technologies Diffusion Vacuum Pumps Diffusion pumps are designed for wider range of applications with high vacuum range up to 1×10-6 mbar. The pumping speed ranges from 3, 000 l/s to 50, 000 l/s. The features that make the diffusion pump attractive for high vacuum use are its high pumping speed for all gases and low cost per unit pumping speed when compared with other types of pump used in the same vacuum range. The oil diffusion pump is operated with an oil of low vapor pressure. The high speed jet is generated by boiling the fluid and directing the vapor through a jet assembly.